光學接近修正(Optical Proximity Correction；OPC)是讓現有光刻設備能夠不斷向下挑戰微影尺寸極限的一種技術。隨著制程製程的微縮、微影光罩技術的 ... ... <看更多>
「optical proximity correction」的推薦目錄：
optical proximity correction 在 Optical Proximity Correction (OPC) - Semiconductor Engineering 的相關結果
Optical proximity correction (OPC) is often associated with a photomask. The photomask is produced in a photomask facility. In the flow, a chipmaker designs ... ... <看更多>
optical proximity correction 在 OPC & PSM - MacDermid Alpha Electronics Solutions 的相關結果
... immersion lithography, optical proximity correction (OPC), and phase shift masks (PSM), known as Resolution Enhancement Techniques (RET). ... <看更多>
optical proximity correction 在 Efficient optical proximity correction based ... - OSA Publishing 的相關結果
Optical proximity correction (OPC) is a widely used resolution enhancement technique (RET) in optical lithography to improve the image ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction (OPC) Under Immersion ... 的相關結果
PV-OPC is an effective algorithm as it exploits variational EPE under representative process conditions with satisfying mask notch rule. Keep out zone (KOZ) ... ... <看更多>
optical proximity correction 在 碩士論文 - 國立交通大學 的相關結果
在各種解析度增強技術的方法之中，光學鄰近修正. （optical proximity correction, OPC）是額外考慮未來光罩在曝光時會產生的繞射. 效應，為了避免曝光後的結果與預期有 ... ... <看更多>
optical proximity correction 在 Optical proximity correction for anamorphic extreme ultraviolet ... 的相關結果
The required changes for each step in the mask tape out process are discussed, with a focus on optical proximity correction (OPC). When ... ... <看更多>
optical proximity correction 在 Optical proximity correction: A cross road of data flows 的相關結果
This paper reviews the various data flows that occur in the generation and verification of optical proximity correction (OPC) for an optical ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction, Methodology and Limitations 的相關結果
Since the early 2000's, model based Optical Proximity Correction (MB-OPC) has been used by the semiconductor industry to improve the linewidth uniformity ... ... <看更多>
optical proximity correction 在 Evaluation and demonstration of the optical proximity ... 的相關結果
OPTISSIMO is a newly developed software tool from AISS for optical proximity correction and simulation in IC manufacturing. Optical Proximity Correction is ... ... <看更多>
optical proximity correction 在 Source imperfection impacts on optical proximity correction 的相關結果
This study explores the impact of illumination source defects on photolithography image fidelity when optical proximity correction (OPC) is used on the ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction | Siemens Software 的相關結果
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process ... ... <看更多>
optical proximity correction 在 Optical proximity correction with hierarchical Bayes model 的相關結果
Optical Proximity Correction (OPC) is one of the most important techniques in today's optical lithography based manufacturing process. ... <看更多>
optical proximity correction 在 Efficient optical proximity correction based on virtual ... - PubMed 的相關結果
Optical proximity correction (OPC) is a widely used resolution enhancement technique (RET) in optical lithography to improve the image ... ... <看更多>
optical proximity correction 在 Optical proximity correction convergence control - Google 的相關結果
A method of optical proximity correction (OPC) convergence control that includes providing a lithography system having a photomask and an illuminator. ... <看更多>
optical proximity correction 在 Optical proximity correction | Topic | Microsoft Academic 的相關結果
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction 的相關結果
Professor N. Cheung, U.C. Berkeley. Lecture 5. EE143 F2010. 1. Optical. Proximity. Correction. *Auxiliary features added on mask. ... <看更多>
optical proximity correction 在 True Process Variation Aware Optical Proximity Correction ... 的相關結果
True Process Variation Aware Optical Proximity Correction with. Variational Lithography Modeling and Model Calibration∗. Peng Yu,† Sean X. Shi,‡ and David ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction Using a New Hyper Error ... 的相關結果
To avoid lithography hotspots and enhance the yield of integrated circuits, we can use Model-based Optical Proximity Correction (MBOPC) to improve image ... ... <看更多>
optical proximity correction 在 Intelligent optical proximity correction using genetic algorithm ... 的相關結果
Corrections of mask patterns between the sample and post exposure result are thus necessary. Optical proximity correction (OPC) is the ... ... <看更多>
optical proximity correction 在 CN101893820A - Method of optical proximity correction 的相關結果
The invention discloses a method of optical proximity correction, comprising the following steps of firstly, supplying a wafer which comprises a main ... ... <看更多>
optical proximity correction 在 Process Proximity Compensation - Cadence 的相關結果
... traditional optical proximity correction (OPC) / resolution enhancement technology (RET) methodologies are not able to keep up with the stringent ... ... <看更多>
optical proximity correction 在 3.3.1 Die-Size Simulation of Optical Proximity Correction 的相關結果
The most important application of large area or die-size simulators is optical proximity correction (OPC). The proximity effect refers to the situation that ... ... <看更多>
optical proximity correction 在 optical proximity correction (OPC) - 光學鄰近修正 - 國家教育 ... 的相關結果
optical proximity correction (OPC). 以optical proximity correction (OPC) 進行詞彙精確檢索結果. 出處/學術領域, 英文詞彙 ... ... <看更多>
optical proximity correction 在 Optical proximity correction - Wikipedia 的相關結果
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process ... ... <看更多>
optical proximity correction 在 當年度經費： 574 千元 - 政府研究資訊系統GRB 的相關結果
鄰近修正(Optical Proximity Correction)方法。在半導體製程裡，光學鄰近修正是一種常用來改善光罩圖形失真問題的光學光刻方法，可以藉由它來補償原始的光罩圖形，使得 ... ... <看更多>
optical proximity correction 在 A fast manufacturability aware Optical Proximity Correction ... 的相關結果
Aggressive Optical Proximity Correction (OPC) has been widely adopted in optical lithography to preserve circuit performance for sub-20nm technology nodes. ... <看更多>
optical proximity correction 在 Optical Proximity Correction - Google Books 的相關結果
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction在線翻譯_英語 - 海词词典 的相關結果
海詞詞典,最權威的學習詞典,為您提供Optical Proximity Correction的在線翻譯,Optical Proximity Correction是什麼意思,Optical Proximity Correction的真人發音, ... ... <看更多>
optical proximity correction 在 optical proximity correction method and apparatus 的相關結果
An optical proximity correction method and apparatus. The optical proximity correction method comprises: manufacturing a test mask plate; ... ... <看更多>
optical proximity correction 在 Optical proximity correction using a multilayer perceptron ... 的相關結果
Optical proximity correction (OPC) is one of the resolution enhancement techniques (RETs) in optical lithography, where the mask pattern is modified to ... ... <看更多>
optical proximity correction 在 Optical proximity correction (OPC): friendly maze routing 的相關結果
Optical proximity correction (OPC) is one of the methods adopted to compensate for the light diffraction effect as a post layout process. ... <看更多>
optical proximity correction 在 博碩士論文行動網 的相關結果
論文名稱(外文):, Hotspot Guided Model-based Optical Proximity Correction ... 電路線寬(line width)不斷地微小化，以致於利用光學微影技術(Optical Lithography)將 ... ... <看更多>
optical proximity correction 在 Optical proximity correction (OPC) in near-field lithography ... 的相關結果
Optical proximity correction (OPC) in near-field lithography with pixel-based field sectioning time modulation. Seonghyeon Oh, Dandan Han, ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction with Linear Regression - CiteSeerX 的相關結果
... Integrated Circuit (IC) manufacturing is optical proximity correction (OPC). ... the non-ideal optical and process effects of optical lithography system. ... <看更多>
optical proximity correction 在 "Printability and Line Edge Roughness of Optical Proximity ... 的相關結果
Optical Proximity Correction (OPC) has been used for many years now in the semiconductor industry to provide through-pitch focus and dose matching across an ... ... <看更多>
optical proximity correction 在 Method to determine optical proximity correction and assist ... 的相關結果
Optical proximity correction (OPC) and assist feature rules are generated using a process window (PW) analysis. A reference pitch is chosen and the mask ... ... <看更多>
optical proximity correction 在 The Selection and Creation of the Rules in Rules-Based ... 的相關結果
wafer, optical proximity correction (OPC) is the most commonly used methodology, which aims at modifying the patterns on the mask in advance to compensate ... ... <看更多>
optical proximity correction 在 Machine learning guided optical proximity correction, DFM ... 的相關結果
Optical proximity correction (OPC) is used to modulate the mask design to compensate the image error from the mask to the wafer. As the. ... <看更多>
optical proximity correction 在 Scaling Synopsys Proteus optical proximity correction on AWS 的相關結果
In order to compensate, optical proximity correction (OPC) calculates the effects of these distortions on the final image and modifies the ... ... <看更多>
optical proximity correction 在 Optical proximity correction in DRAM cell using a new ... - SPIE 的相關結果
An optical proximity correction algorithm based on statistical methodology is developed. The response surface function (RSF) for the CD in the lithographic ... ... <看更多>
optical proximity correction 在 Optical proximity correction technique for enhancing the ... 的相關結果
Instead of making them perfect, optical proximity correction (OPC) can be used to modify mask geometries to compensate for pattern transfer ... ... <看更多>
optical proximity correction 在 Optical Proximity Correction - KLayout 的相關結果
Optical Proximity Correction ... Hi All, I am doing some layout which requires sharp corners of shapes on the wafer after the photolithography and ... ... <看更多>
optical proximity correction 在 Application of optical proximity correction technology 的相關結果
According to the need of the correction precision, the OPC system divides patterns corrected into two groups with different toleration: critical patterns and ... ... <看更多>
optical proximity correction 在 optical proximity correction 中文意思是什麼 - TerryL 的相關結果
optical proximity correction 解釋. 光學距離校正. optical: adj 眼的；視覺的；視力的；幫助視力的；光學（上）的。 optical activity 【物理學】旋光性。 an ... ... <看更多>
optical proximity correction 在 Method for process window optimized optical proximity ... 的相關結果
One embodiment of a method for process window optimized optical proximity correction includes applying optical proximity corrections to a design layout, ... ... <看更多>
optical proximity correction 在 Optical proximity correction (OPC) modeling methods and ... 的相關結果
A method for manufacturing a semiconductor device includes performing an optical proximity correction (OPC) process on a designed layout ... ... <看更多>
optical proximity correction 在 optical proximity correction - 英中– Linguee词典 的相關結果
大量翻译例句关于"optical proximity correction" – 英中词典以及8百万条中文译文例句搜索。 ... <看更多>
optical proximity correction 在 Synopsys' Proteus Optical Proximity Correction Software ... 的相關結果
Synopsys' Proteus Optical Proximity Correction Software Delivers Near Linear Performance Increase Using 1000 Intel® Xeon™ Processors. ... <看更多>
optical proximity correction 在 EP 1197802 B1 20060329 - Method of optical proximity ... 的相關結果
289534447 - EP 1197802 B1 20060329 - Method of optical proximity correction - [origin: EP1197802A2] A method of carrying out optical proximity correction in ... ... <看更多>
optical proximity correction 在 Optical proximity correction for 0.13 m SiGe:C BiCMOS 的相關結果
Optical proximity correction for 0.13 m SiGe:C BiCMOS ... Source, Behringer, U.F.W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, ... ... <看更多>
optical proximity correction 在 optical proximity correction (opc)的中文意思 - Dict.site 英漢/漢 ... 的相關結果
optical proximity correction (opc) 解釋. 光學距離校正. optical : adj 眼的；視覺的；視力的；幫助視力的；光學（上）的。 optical activity 【物理學】旋光性。 an ... ... <看更多>
optical proximity correction 在 Optical Proximity Corrections for Digital Micromirror Device ... 的相關結果
We propose optical proximity corrections (OPCs) for digital micromirror device (DMD)-based maskless lithography. A pattern writing scheme is analyzed and a ... ... <看更多>
optical proximity correction 在 【光刻】光学邻近效应修正Optical Proximity Correction (OPC) 的相關結果
这些失真如果不纠正，可能大大改变生产出来的电路的电气性能。光学邻近效应修正(Optical Proximity Correction,OPC)就是使用计算方法对掩膜上的图形做修正 ... ... <看更多>
optical proximity correction 在 Optical proximity correction (OPC)-friendly maze routing 的相關結果
Optical proximity correction (OPC) is one of the methods adopted to compensate for the light diffraction effect as a post layout process. ... <看更多>
optical proximity correction 在 Optical proximity correction (OPC) in near-field ... - X-MOL 的相關結果
Optical proximity correction (OPC) in near-field lithography with pixel-based field sectioning time modulation. Seonghyeon Oh 1, Dandan Han 1, ... ... <看更多>
optical proximity correction 在 Team seeks to ease use of optical proximity correction 的相關結果
Under the deal, ASM MaskTools will integrate MaskRigger, its optical proximity correction (OPC) software, with Transcription's market-leading Computer Aided ... ... <看更多>
optical proximity correction 在 File:Optical proximity correction structures.svg - - Wikimedia ... 的相關結果
2010-01-10T19:54:30Z Cepheiden 730x300 (8720 Bytes) {{Information |Description={{en|1=Structures of optical proximity correction (correction pattern)}} ... ... <看更多>
optical proximity correction 在 Optical proximity correction with hierarchical ... - CUHK CSE 的相關結果
Optical proximity correction (OPC) is one of the most important techniques in today's optical lithog- raphy-based manufacturing process. ... <看更多>
optical proximity correction 在 IBM and Synopsys Demonstrate EUV OPC Workload Runs ... 的相關結果
As one example, we discuss an optical proximity correction (OPC) workload. An engineer starts with an intended semiconductor design, ... ... <看更多>
optical proximity correction 在 via spacing + optical proximity correction | Forum for Electronics 的相關結果
The error we got during DFm in form of optical proximity correction recommendation.. Deepak. ... <看更多>
optical proximity correction 在 Nanometer Scale Patterning and Processing - nanoHUB 的相關結果
Optical proximity correction : modifies the mask design to restore the desired pattern. The sub-resolution features won't appear in the resist. ... <看更多>
optical proximity correction 在 OPC (Optical Proximity Correction) - 블로그 - 네이버 的相關結果
OPC (Optical Proximity Correction) ... Shimhead 께서 설명해주신 "OPC 란 ?" OPC 란 ? 한글 그대로 번역하면 "광 근접 보정" 이란다. 참 투박하고 어색한 ... ... <看更多>
optical proximity correction 在 Photolithography and resolution enhancement techniques (RET) 的相關結果
Optical lithography Resolution: Contact aligner Proximity aligner Projection ... mask (PSM) Optical proximity correction (OPC) Double processing ECE 730: ... ... <看更多>
optical proximity correction 在 IDF 2004 Russia: 65nm Process Technology – Nearest Future ... 的相關結果
90-65 nm, Size control, Alternating Phase Shift Masks (APSM), Optical Proximity Correction (OPC). 65-30 nm, Mask making, EUV lithography (in far ultraviolet ... ... <看更多>
optical proximity correction 在 Photo 공정 - 미세화에 따른 분해능 향상 기술 - Daum 블로그 的相關結果
① PSM(Phase Shift Mask, 위상변위 마스크) · ② OPC(Optical Proximity Correction, 광 근접효과 보정기술) · ③ ARC( Anti-Reflective Coating, 반사방지 ... ... <看更多>
optical proximity correction 在 iPhone 13 Pro and 13 Pro Max - Technical Specifications 的相關結果
... Dual optical image stabilization for video (Telephoto and Wide); Sensor‑shift optical ... Wide color capture for photos and Live Photos; Lens correction ... ... <看更多>
optical proximity correction 在 'EUV의 모든 것'…반도체 EUV 글로벌 컨퍼런스 12월22일 개최 的相關結果
... 렌즈 수차가 0.5 이상으로 높아진 고해상도 EUV 시대에 발맞춰 새로운 광근접보정(OPC:Optical Proximity Correction) 솔루션을 준비 중입니다. ... <看更多>
optical proximity correction 在 Resolving sub-angstrom ambient motion through ... - Nature 的相關結果
By placing molecules within the sub-wavelength-confined optical fields ... DFT calculations show that an adatom in proximity to NC-BPT will ... ... <看更多>
optical proximity correction 在 Microchip Technology: Smart | Connected | Secure 的相關結果
Microchip Technology Inc. (MCHP) is a leading provider of microcontroller, mixed-signal, analog and Flash-IP solutions, providing low-risk product ... ... <看更多>
optical proximity correction 在 Contact lenses that deliver far more than vision correction 的相關結果
“Novel biomaterials, nanotechnology progress, unique optical designs, biosensing discoveries, antibacterial surfaces and battery miniaturization ... ... <看更多>
optical proximity correction 在 Barcode Scanners | KEYENCE America 的相關結果
Barcode scanners and 2D code readers that have good scanning speed, reading distance, wide field of view, large depth of field, and distortion corrections for ... ... <看更多>
optical proximity correction 在 iPhone 13 Pro: All the Details! Reviews, Features, More 的相關結果
The 77mm Telephoto lens features 3x optical zoom in, ... There's a built-in three-axis gyro, an accelerometer, proximity sensor, ... ... <看更多>
optical proximity correction 在 Spitzer mid-infrared detections of neutron star merger ... 的相關結果
The fixed detector/optical diffraction patterns in the IRAC PSF profiles ... 2006), as our reference for the ZOGY PSF and measure the flux-correction ... ... <看更多>
optical proximity correction 在 Apple iPhone 13 Pro Max- $1000 Off at AT&T 的相關結果
Zoom, 3x optical zoom in, 2x optical zoom out; 6x optical zoom range. Digital zoom up to 15x ... Lens correction (Ultra Wide) ... Proximity Ambient light ... ... <看更多>
optical proximity correction 在 Rockwell Product Catalog 的相關結果
Encoders, Incremental Optical Encoders (2) ... DySC Voltage Sag Correction Devices (2). Switched Mode (2) ... Capacitive Proximity (3). ... <看更多>
optical proximity correction 在 realme GT NEO 2 - BCI Mobile 的相關結果
... Text Scanner, Portrait Distortion Correction, Tilt-shift, Starry Mode, ... Proximity Sensor - Gyro-meter - Acceleration Sensor - In-display optical ... ... <看更多>
optical proximity correction 在 GJ 367b: A dense, ultrashort-period sub-Earth planet ... 的相關結果
A noise-correction model has been applied to the data (9). ... because of its close proximity to the host star, ~576 times the incident flux on Earth. ... <看更多>
optical proximity correction 在 Cheap Apple iPhone 13 Pro Phone Deals | Currys Mobile 的相關結果
With 3x optical zoom on the telephoto lens, you can shoot from further away. ... Live Photos - Lens correction (Ultra Wide) - Advanced red‑eye correction ... ... <看更多>
optical proximity correction 在 Istc/cstic 2009 (cistc) - 第 356 頁 - Google 圖書結果 的相關結果
[15] J. F. Chen, T. Laidig, K. Wampler, and R. Caldwell, “Optical proximity correction for intermediate-pitch features using sub- resolution scattering bars ... ... <看更多>
optical proximity correction 在 Fundamental Principles of Optical Lithography: The Science ... 的相關結果
Optical Proximity Correction (OPC)A method of selectively changing the sizes andshapes of patternson themask in order to more exactly obtain the desired ... ... <看更多>
optical proximity correction 在 Semiconductors: Integrated Circuit Design for Manufacturability 的相關結果
(LfL) Library-based.optical.proximity. correction,.121–122 Life.cycle.of.system,.33 Lightning.electromagnetic.pulse. (LEMP),.64 Limited.market.size,.9 ... ... <看更多>
optical proximity correction 在 Nano-scale CMOS Analog Circuits: Models and CAD Techniques ... 的相關結果
7.4.1 Optical Proximity Correction While the layout of an integrated circuit is transferred from the mask to the semiconductor by different imaging ... ... <看更多>
optical proximity correction 在 Modern VLSI Design: IP-Based Design (paperback) - Google 圖書結果 的相關結果
This effect is known as optical proximity. ... the shapes on the corrected mask. correction techniques Optical proximity correction (OPC) analyzes masks, ... ... <看更多>
optical proximity correction 在 Applied Scanning Probe Methods VIII: Scanning Probe ... 的相關結果
... VIII 99, VIII 106 optical lever VIII 290 calibration VIII 290 optical microscope IX 182 optical proximity correction X 398 optical resolution VIII 78, ... ... <看更多>
optical proximity correction 在 Nanolithography: The Art of Fabricating Nanoelectronic and ... 的相關結果
Compact models are used in the optical proximity correction (OPC) process. This allows the model form to be used to model every feature on an entire chip ... ... <看更多>
optical proximity correction 在 Extending Moore's Law through Advanced Semiconductor Design ... 的相關結果
See Optical proximity correction (OPC) OPD (optical path difference), 83–84 Optical imaging systems, 75 OPD, 83–84 parameters, 77 resolution, ... ... <看更多>
optical proximity correction 在 The Electrical Engineering Handbook - Six Volume Set 的相關結果
... environment with an all-reflective optical exposure station to fabricate ... off-axis illumination (OAI) [11], optical proximity correction (OPC)[11] ... ... <看更多>
optical proximity correction 在 Variable time fuze - Muy Lila 的相關結果
The breakthrough came in 1943 with the introduction of the proximity fuze (or "variable time ... No HOB correction is needed because variable time fuze. ... <看更多>
optical proximity correction 在 Optical proximity correction - Wikipedia 的相關結果
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process ... ... <看更多>